Products For Semiconductor/FPD Applications
POINT
We provide high quality chemicals at lower costs.
Adopting overseas products can
contribute to dealing with BCP.
LOT Vacuum develops, manufactures and sells vacuum pumps for semiconductor and FPD
manufacturing processes.
LOT Vacuum is the No. 1 manufacturer with a market share of more than 80% in CVD processes in the Korean
semiconductor market, with the sales record of more than 20,000 units worldwide.
POINT
A hybrid vacuum pump that combines screw and roots types has been developed.
Its high
displacement capacity reduces noise and power consumption.
This detector monitors a deposition process by measuring current, voltage, phase angle, impedance, etc. When an error is detected in the process chamber, it stops the system and improves yield. It also optimizes the endpoint during cleaning and contributes to reducing the amount of cleaning gases such as NF3 and to extending the service life of process kits such as a shower head.
POINT
Endpoint detection based on impedance provides greater reliability than optical
detectors.
It has no parts to replace due to degradation (such as an optical window) and thus is maintenance free.
It is
applicable to various types of semiconductor, FPD, solar cell and PECVD/CVD equipment: AMAT, LAM/Novellus, SPTS,
AKT, ULVAC, etc.
WCS M300: Automated all-in-one VPD-ICP-MS system
This system is capable of high sensitivity analysis of metal contamination on wafers at
sub-ppt level.
This is a fully automated VPD-ICP-MS system that automates everything from sampling,
pre-treatment to post-cleaning with a high level of safety.
POINT
It is a system that integrates Sampling/VPD/ICP-MS in one space-saving housing.
Automated
operation is achieved, from pre-treatment through to post-treatment, due to ICP-MS system calibration, automatic
cleaning of sample tubes, self-diagnosis of cleanliness, and automatic preparation of scanning and cleaning
solutions.
OCIM: On-line chemical impurity monitoring system
This system is capable of on-line/real-time analysis of metallic impurities in chemicals, UPW
and gases at sub-ppt level.
This is a fully automated sampling and analysis system that is safe and prevents
sample contamination.
POINT
Everything from sampling, pre-treatment, measurement through to post-cleaning can be done
fully automatically with this on-line monitoring system.
Up to 60 channels can be measured with one main unit.
Leak sensors that can be used for the interlock system
and gas detectors are equipped.
We provide scrubbers and chillers of UNISEM, a leading manufacturer in Korea.
Back-Up function
Low cost
Space-saving
Energy-saving
Compatible with all gases
Superb maintenance services
UNISEM is a leading manufacturer of scrubbers and chillers for semiconductor and LCD processes
in Korea.
Especially for scrubbers, they offer a wide range of product types such as combustion, plasma, heater and hybrid
to meet various characteristics of production process and process gas, and the amount of waste gas treatment, etc.
Several hundred units have been installed in Japan, and the flexibility to deal with customized designs is highly
regarded.
POINT
With scrubbers, we excel in CVD processes where large capacity is required and a large amount
of by-product is produced.
We are also focusing on R&D of next generation equipment for both scrubbers and
chillers, targeting energy saving and size reduction.
We provide optimal equipment designs and coherent
after-sales servicing from system start-up to maintenance work through collaboration of UNISEM’s experience and
local support by NISHIMURA CHEMITECH.
Scrubber
Chiller
SUPPORT
Support structure
| Sales Gr. |
*Mediation & negotiation with customers/UNISEM *Determining specifications and handling trouble calls, etc. |
|---|---|
| F/E Gr. |
*System startup, servicing, maintenance, troubleshooting |
| UNISEM resident staff |
*Detailed feedback to the home country |
| Sales Gr. |
*Overall support required to expand business in Japan |
|---|---|
| Electrical/Design Gr. |
*Hardware and software specification design *Design proposals for retrofit/improvement |
| R&D Gr. |
*Research and experiments to improve abatement efficiency and reduce running costs, mainly. |